Axial diagnosis of radio-frequency capacitively coupled Ar/O₂ plasma

The capacitively coupled Ar plasma containing oxygen, driven by a radio frequency of 27.12 MHz, is investigated laser-induced photo-detachment technique assisted with Langmuir probe. plasmas different amounts oxygen are obtained changing the flow and each which controlled mass controller. axial distribution characteristic can be measured relative position probe between parallel electrodes. electron density temperature calculated from current-voltage curve scanning probe, electronegativity current curves technique. negative ion electronegativity. It shown that rate increasing, dissociative attachment molecules electrons will consume middle energy in probability function (EEPF) EEPF evolves Druyvesteyn to Maxwellian due thermalization e-e interaction applied power increasing. worth mentioning depression appear when discharging high-pressure gas oxygen. This also caused where threshold around 4.5 eV. profile linear rise pure flater phase ions such as introduced into plasma. changes little at positions. nearby sheath powered electrode collision energetic electrons. In addition, takes on shape spoon, results consequence generation loss process ambipolar-electric-field-driven diffusion center.